I doubt they have anything viable right now. Having actually watched these EUV machines get installed, seen the insides up close and personal, and talked to the techs about them extensively; there is a reason nobody else has made them yet. They’re incredibly complex, requiring extreme care and precision, a ton of power, and they are fickle. I was at GF Fab 8 when they got their EUV machines; it was a process, I’ll tell you that much. Custom cranes had to be installed in the fab just to facilitate any sort of meaningful work on them, and they were down a lot.

This could actually be why they’re entering China. Emerging economies might buy much cheaper older tech from Chinese machines instead of cutting edge &expensive ASML machines… Once the tech is out, Pandoras box can’t be unopened (from ASML’s perspective). Stifling Chinese adoption early might make any Chinese competitor nonviable without govt support. Overall might be worth any retribution from the US.